Low Magnification Calibration Standards
December 12, 201620mm Low Magnification Calibration Specimen
Features
20mm crossed graticule with 0.01mm divisions
75nm thick, 3.5µm wide chrome lines
Die size 22x11mm
Available on Ultra-Flat Silicon (525µm ± 20µm thick B-doped with 5-10 ohm-cm resistivity and orientation) or Quartz substrates
Serial number laser etched on each die
NIST Traceable
Example image of Quartz Low Magnification Calibration Standard