Microporous Silicon Nitride Membranes
January 19, 2016Typical Specifications
Low-Stress 200nm silicon nitride membrane for added resilience
0.5mmx0.5mm up to 1.0×1.0mm aperture
5.0, 2.50, 1.25 and 1.0 micrometer circular holes
Close packed hexagonal arrangement for high-density of holes
450×450 micrometer array
Fabricated using photolithography