20mm Low Magnification Calibration Specimen

Features

• Die size 12.5×12.5mm
• Substrate 675µm ± 25µm thick Boron-doped silicon with resistivity of 5-10ohm-cm and <100> orientation
• 144 1x1mm indexed grids defined by 75nm thick, 20µm wide chrome lines.

Single die layout

Optical image