Silicon Substrates
December 21, 2016Available as 150mm and 100mm diameter Whole Silicon Wafers and as 5x5mm, 5x7mm, 10x10mm, and 3.0mm diameter Diced Silicon Chips
All Silicon Substrate products utilize Ultra-Flat Silicon Wafers with the following typical specifications:
Ultra-flat 6” wafers
Material: CZ Virgin Silicon Wafer
Grade: Prime
Diameter: 150mm
Orientation: <100>
Type/Dopant: P/Boron
Resistivity: 10-20ohm-cm
Thickness: 675µm +/- 20µm
TTV: <=2µm
Site Flatness: <=1µm
Warp: <=30µm
Bow: <=20µm
Particles: <=30@>=0.2µm
Front Surface: Polished
Back Surface: Etched
Flat: 1 per SEMI Standard, flat length 57.5mm +/- 2.5mm)
Ultra-flat 4” wafers
Material: CZ Virgin Silicon Wafer
Grade: Prime / CZ Virgin
Orientation: <100>
Diameter: 100mm
Type: P / Dopant: Boron
Resistivity: 10-20ohm-cm
Wafer Thickness: 525µm +/- 20µm
TTV: <= 4.00µm
Site Flatness: <=? µm
Warp: <=30µm
Bow: <=20µm
Particles: <=20@>=0.3µm
Front Surface: Polished
Back Surface: Etched
Flats: 2 per SEMI Standard, primary flat length 32.5 ± 2.5mm, secondary flat 18.0 ± 2.0mm
